Joint development of the plasma heat treatment technology with Techno Arc Shimane
Currently, we are participating in a project jointly carried out by industry, academia, and government at the Plasma Technology Research and Development Center in Shimane Prefecture with an aim to develop an industrial-scale multi-chamber plasma heat-treatment equipment, which is equipped with the plasma heat treatment chamber, transfer chamber, helium pressure quench chamber, and load/unload lock chamber. Upon developing the plasma carburizing technology for industrial use through utilizing this equipment, the technology will be applied in industrial scale to automobile parts and die parts. We will strive to improve our technology as a heat treatment manufacturer.
- Development of a mass production process for utilizing the plasma heat treatment technology and In-situ control technology in industrial scale
- Verification of quenching properties by helium gas pressure quenching as a mass production process and development of a cooling gas recycling system
- Development of the plasma surface modification technology for mass production of actual products, such as automobile parts and dies
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Multi-Chamber Plasma Heat-Treatment Equipment
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Plasma Carburizing Technology
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In-situ Control Technology
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Multi-Chamber Plasma Heat-Treatment Equipment
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Active Screen Plasma Nitriding furnace
This furnace forms glow discharge between the furnace wall and the screen, increases the temperature of the material by heat radiation from the screen, and modifies the surface of a workpiece with the activated species that pass through the screen. As the furnace does not form glow discharge on the surface of the workpiece, uneven modification (edge effect, hollow-cathode effect) due to the shape of the workpiece can be avoided.
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Active Screen Plasma Nitriding Furnace
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Operating active screen
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Specifications
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| Furnace structure: |
Bell type, double-walled steel structure |
| Cooling method: |
Water cooled double jacket (equipped with agitator) |
| Useable furnace dimensions: |
Diameter 1000mm x Height 1200mm |
| Used gases: |
Hydrogen / Argon / Nitrogen / Methane / Oxygen |
| Exhaust system: |
Mechanical booster pump / Oil rotary pump |
| Vacuum pumping capacity: |
Vacuum 0.1mbar or less (empty furnace, room temperature)
Pumping speed Within 20 minutes, up to 0.1mbar
(Empty furnace / Room temperature / Degasified / After N2 substitution) |
| Control program: |
Interactive program available with PLC |
| Power: |
150kVA with phase 400V (Plasma power: 120kV / Others: 20kVA) |
| Cooling water conditions: |
Water volume 250~350/hr (Water pressure: 3 bar / Water temperature: 15~2ﾟC or less) |
| Composition: |
Load/unload lock chamber / Transfer chamber / Plasma heat-treatment chamber / Pressure quench chamber / In-situ control chamber |
| Usable dimensions: |
600W x 600L x 900H(mm) |
| Charge weight: |
Gross 500kg/charge |
| Service temperature: |
Load/unload lock chamber
Normal 250~300ﾟC / Max. 350ﾟC
Plasma heat-treatment chamber
Normal 500~1300ﾟC / Max. 1350ﾟC |
| Gases: |
CH4 / C3H8 / Ar / H2/ N2 |
| Plasma power: |
DC pulse plasma |
| Monitoring system: |
(RUig: Micropulse Plasma Generator) |
| Cooling measurement: |
Ellipsometer / Emission spectrophotometer
10ber helium gas pressure quenching |
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Plasma Technology Research and Development Center
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