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CVD Coating Equipment

CVD Coating Equipment: Outline

  • he internal configuration of all coating chambers is so designed that it can accommodate parts of any shape. There are no restrictions on the shape of the parts to be coated.
  • One heating chamber is capable of handling two to four coating chambers.
  • Coating is done at a specified pressure.
  • The process sequencer, though it is monitored by a pre-programmable automated processor, has control functions and means for adjustment.
  • The gas supply equipment is snuggly integrated into the coating equipment.
CVD Process
CVD stands for Chemical Vapor Deposition. CVD is a method for depositing dense adhesive solid layers of uniform thickness in which a gaseous mixture is decomposed and deposited on the workpiece surface as chemical reactions take place among gases.
Spacifications and dimensions
Type of equipment
1H-1
1H-2
2H-4
1H-1S
1H2S
Number of furnace
1
1
2
1
2
Number of heating zones per furnace
6
6
6
4
4
Number of coating chambers
1
2
4
1
2
Coating chamber processing area dimensions
ø 360 x 900mm
ø 250 x 500mm
Coating temperature
750 - 1050°C
( depending on type of coating applied)
Rate of deposition
3 µm / h
( depending on type of coating applied )
Number of coating layers
TiC,TiC+TiCN+TiN
Power Supply
220V 50 / 60Hz / cps
Power consumption
50Kw
55Kw
120Kw
30Kw
35Kw
Space requirement (equipment)
6 x 6m
8 x 6m
14 x 6m
7 x 5m
7 x 5m
Required crane hook height
5.4m
5.4m
5.4m
4m
4m

SAMPLE


 

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